Vacuum capacitors for semiconductor matching networks in plasma deposition equipment, RF transmitters, industrial heating and sealing machinery and MRI.. Select from variety of variable vacuum capacitor designs: Standard type vacuum capacitor High current type vacuum capacitor High voltage type vacuum capacitor High frequency type vacuum capacitor Gold type vacuum capacitor Capacitance range : 6 - 2000 pF Voltage range : 5 - 35 kVp Current range : up to 190 Arms Life span : > 10 million cycles Replacements for well known brands available.

Compact T Series - Vacuum Capacitors Variable Max RF Current (Arms) at 13.56MHz Model Peak Test Voltage (kVp) Peak Working Voltage (kVp) Capacitance (pF) Max. RF Current   (Arms)  Size (mm) Torque (N・cm) SCV-155T 15 9  70-500  80 80 130xφ52 17.6 SCV-510T 5 3  70-1000 80 80 130xφ52 17.6 SCV-514T 5 3 220-1400 80 80 130xφ52 17.6 SCV-155TS 15 9  70-500  100 100 115xφ62 23.8 SCV-510TS 5 3  70-1000 100 100 115xφ62 23.8 SCV-155TL 15 9  50-500  120 120 115xφ74 29.4 SCV-510TL 5 3  50-1000 120 120 115xφ74 29.4 120 120 115xφ74 29.4 SCV-514TL 5 3  60-1400 Standard Type - Vacuum  Capacitors Variable Max RF Current (Arms) at  13.56MHz Model Peak Test Voltage (kVp) Peak Working Voltage (kVp) Capacitance (pF) Max. RF Current   (Arms)   Max. RF Current   (Arms)   Water cooled Size (mm) Torque (N・cm) SCV-520M 5 3 85-2000 100 100 130 130 140xφ89 24.5 SCV-514M 5 3 90-1400 100 100 130 130 140xφ89 24.5 SCV-510M 5 3 50-1000 100 100 130 130 140xφ89 24.5 SCV-7.55 7.5 4.5 30-500 100 100 130 130 140xφ89 24.5 100 100 130 130 140xφ89 24.5 SCV-1010 10 6 80-1000 SCV-155M 15 9 50-500 100 100 130 130 140xφ89 24.5 SCV-152.5 15 9 30-250 100 100 130 130 140xφ89 24.5 SCV-152 15 9 12-200  100 100 130 130 140xφ89 24.5 SCV-151 15 9 10-100  100 100 130 130 140xφ89 24.5 SCV-204 20 12  80-450 100 100 130 130 140xφ89 24.5   High Current Type - Vacuum Capacitors Variable Max RF Current (Arms)at 13.56MHz Model Peak Test Voltage (kVp) Peak Working Voltage (kVp) Capacitance (pF) Max. RF Current   (Arms)   Max. RF Current   (Arms)   Water cooled Size (mm) Torque (N・cm) SCV-520MA 5 3 85-2000 110 110 140 140 140xφ89 29.4 SCV-514MA 5 3 90-1400 110 110 140 140 140xφ74 29.4 SCV-510MA 5 3 50-1000 110 110 140 140 140xφ74 29.4 SCV-155MA 15 9 50-500 110 110 140 140 140xφ74 29.4 SCV204A 20 12 80-450 110 110 140 140 140xφ89 29.4 SCV-520L 5 3 85-2000 130 130 160 160 180xφ94 49.0 SCV-514L 5 3 45-1400 130 130 160 160 180xφ94 49.0 SCV-510L 5 3 40-1000 130 130 160 160 180xφ94 49.0 SCV-155L 15 9 35-500 130 130 160 160 180xφ94 49.0 SCV-204L 20 12 80-450 130 130 160 160 180xφ94 49.0 SCV-520LA 5 3 85-2000 150 150 190 190 180xφ94 68.6 SCV-514LA 5 3 45-1400 150 150 190 190 180xφ94 68.6 SCV-510LA 5 3 40-100 150 150 184 180 180xφ94 68.6 SCV-155LA 15 9 35-500 150 150 190 190 180xφ94 68.6 SCV-204LA 20 12  8-450 150 150 190 190 180xφ94 68.6   High Voltage Type - Vacuum Capacitors Variable Max RF Current (Arms) at 13.56MHz Model Peak Test Voltage (kVp) Peak Working Voltage (kVp) Capacitance (pF) Max. RF Current   (Arms)   Max. RF Current   (Arms)   Water cooled Size (mm) Torque (N・cm) SCV-304 30 18 70-450 130 130 160 160 220xφ108 49.0 SCV-354 35 21 70-450 150 150 190 190 237.5xφ132 68.6 High Frequency Type - Vacuum Capacitors Variable Max RF Current (Arms) at 13.56MHz Model Peak Test Voltage (kVp) Peak Working Voltage (kVp) Capacitance (pF) Max. RF Current   (Arms)   Max. RF Current   (Arms)   Water cooled Size (mm) Torque (N・cm) SCV-202 20 12 15-200 130 130 156 144 125xφ84 39.2 SCV-201 20 12 12-100 115 72 156 72 125xφ84 39.2 SCV-251.5 25 15 `18-150 146 135 177 135 125xφ94 68.6 SCV-250.8 25 15 13-80 129 72 156 72 125xφ94 68.6   Gold Type - Vacuum Capacitors Variable Max RF Current (Arms) at  13.56MHz Model Peak Test Voltage (kVp) Peak Working Voltage (kVp) Capacitance (pF) Max. RF Current   (Arms)   Max. RF Current   (Arms)   Water cooled Size (mm) Torque (N・cm) SCV-1020G 10 6 85-2000 90 90 115 115 140xφ89 24.5 SCV-1014G 10 6 90-1400 90 90 115 115 140xφ73 24.5 SCV-1010G 10 6 50-1000 90 90 115 115 140xφ73 24.5 SCV-1010GB 10 6 50-1000 90 90 115 115 140xφ65 24.5 SCV-104G 10 6 60-450 90 90 115 115 100xφ63 19.6 SCV-1510G 15 9 80-1000 90 90 115 115 140xφ89 24.5 SCV-155G 15 9 25-500 90 90 115 115 140xφ62 24.5 SCV-205G 20 12 50-500 90 90 115 115 140xφ73 24.5 SCV-201.7G 20 12 45-170 90 90 115 115 100xφ63 19.6 SCV-252.5G 25 15 25-250 90 90 115 115 140xφ62 24.5 SCV-252G 25 15 12-200 90 90 115 115 140xφ62 24.5 SCV-251G 25 15 10-100 90 90 109 90 140xφ62 24.5 SCV-250.8G 25 15 10-80 86 72 104 72 100xφ62 19.6 SCV-250.3G 25 15 6-30 70 27 86 27 100xφ62 19.6 SCV-300.2G 30 18  6-20 67 21 82 21 100xφ62 19.6